Self-test and calibration methods for micro electro-mechanical systems

Anwer Sabah Ahmed, Qais Al-Gayem

Abstract


For the testing of micro electro-mechanical systems, we propose a taxonomy of built-in self-testing methods. These solutions that are non-intrusive, cost-effective and are typically non-intrusive during the testing process are being actively sought after as the cost of micro-electro-mechanical systems (MEMS) testing can account for 50% of the total cost of the end product. The selection of testing methods is analyzed extensively, and a classification table for such methods is presented according to three performance metrics: ease of application, test application, usefulness. Performance table also provides a field test domain for the method. While built-in-self-test (BIST) methods do depend on the application at hand, utilizing the inherent multimodal sensing capability of most sensors could be a promising approach for effective built-in self-test.


Keywords


BIST; MEMS; self-calibration; self-test;

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DOI: http://doi.org/10.12928/telkomnika.v21i1.24251

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TELKOMNIKA Telecommunication, Computing, Electronics and Control
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